An Unbiased MEMS Capacitance-Controlled Oscillator as a Microphone for HMI Applications Conference Contributions uri icon

event

  • 2022 Austrochip Workshop on Microelectronics (Austrochip)

event place

  • Villach

country

  • AUSTRIA

participation category

  • COMUNICACIÓN

main title

  • AUSTROCHIP 2022: 30th Austrian Workshop on Microelectronics, October 11th, Villach, Austria [proceedings]

edition country

  • AUSTRIA

publication date

  • 2022

start page

  • 57

end page

  • 60

isbn

  • 978-1-6654-7309-5

subjects

  • Electronics

keywords

  • micromechanical devices; semiconductor device modeling; resistance; sensitivity; power demand; voltage; capacitance