Elastic properties of B-C-N films grown by N2-reactive sputtering from boron carbide targets Articles uri icon

authors

  • SALAS COLERA, EDUARDO
  • Jimenez Rioboo, R. J.
  • Sanchez Marcos, J.
  • Jimenez Villacorta, F.
  • MUÑOZ MARTIN, ANGEL
  • Prieto, J. E.
  • Joco, V.
  • Prieto, C.

publication date

  • December 2013

start page

  • 213508

issue

  • 21

volume

  • 114

International Standard Serial Number (ISSN)

  • 0021-8979

Electronic International Standard Serial Number (EISSN)

  • 1089-7550

abstract

  • Boron-carbon-nitrogen films were grown by RF reactive sputtering from a B4C target and N2 as reactive gas. The films present phase segregation and are mechanically softer than boron carbide films (a factor of more than 2 in Young's modulus). This fact can turn out as an advantage in order to select buffer layers to better anchor boron carbide films on substrates eliminating thermally induced mechanical tensions.