Ion bearb etching of optical silicon surface and surface roughness optimization Conference Contributions uri icon

authors

  • ZIEGLER, E.
  • DEMARCQ, F.
  • VIVO, AMPARO
  • ROOIJ-LOHMANN, DE, V.
  • PEVERINI, L.
  • KOZHEVNIKOV, IV
  • BERUJON, S.
  • CUERNO REJADO, RODOLFO

event

  • Nanoscale Pattern Formation at Surfaces

event place

  • SAN LORENZO DE EL ESCORIAL

participation category

  • PONENCIA

publication date

  • 2011