Roughness Evolution of Si Surfaces upon Ar Ion Erosion Articles uri icon

authors

  • DE ROOIJ LOHMANN, VITA
  • KOZHEVNIKOV, IV
  • PEVERINI, L.
  • ZIEGLER, E.
  • CUERNO REJADO, RODOLFO
  • BIJKERK, F.
  • YAKSHIN, AE

publication date

  • June 2010

start page

  • 5011

end page

  • 5014

issue

  • 16

volume

  • 256

international standard serial number (ISSN)

  • 0169-4332

electronic international standard serial number (EISSN)

  • 1873-5584

abstract

  • We studied the roughness evolution of Si surfaces upon Ar ion erosion in real time. Following the theory of surface kinetic roughening, a model proposed by Majaniemi was used to obtain the value of the dynamic
    scaling exponent beta from our data. The model was found to
    explain both the observed roughening and the smoothening of the
    surfaces. The values of the scaling exponents alfa and beta, important for establishing a universal model for ion erosion of (Si) surfaces, have been determined. The value of beta proved to increase with decreasing ion energy, while the static scaling exponent alfa was found to be ion energy independent.