MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING Journal

Overview

abbreviation

MAT SCI SEMICON PROC

publication venue for

High quality Al0.37In0.63N layers grown at low temperature ( < 300 degrees C) by radio-frequency sputtering. 100:8-14. 2019

International Standard Serial Number (ISSN)

1369-8001

Electronic International Standard Serial Number (EISSN)

1873-4081