authors LOPEZ QUESADA, GUILLERMO TATSIOS, GIORGIOS ROJAS CARDENAS, Marcos BALDAS, Lucien BARROT, Christine COLIN, Stéphane VALOUGEORGIS, Dimitris
event 5th European Conference on Microfluidics µFlu18 and 3rd European Conference on Non-Equilibrium Gas Flows NEGF18
keywords multistage knudsen pump; thermal transpiration; rarefied gas flow; vacuum micropump; tapered channel: diode effect; kinetic modeling