Improving the manufacturing process of multi-level microfluidic devices based on the lamination of successive dry film photoresist layers Conference Contributions uri icon

authors

  • LOPEZ QUESADA, GUILLERMO
  • COLIN, Stéphane
  • VALOUGEORGIS, Dimitris
  • BALDAS, Lucien
  • BARROT, Christine
  • ROJAS CARDENAS, Marcos

event

  • International Symposium on Thermal Effects in Gas Flows in Microscale (ISTEGIM 2019)

event place

  • Ettlingen

country

  • ALEMANIA

participation category

  • CONFERENCIA

main title

  • Proceedings of the International Symposium on Thermal Effects in Gas flows In Microscale

edition country

  • ESPAÑA

publication date

  • 2019

subjects

  • Industrial Engineering

keywords

  • microfabrication microfluidics knudsen pump dry film lamination photolithography; microfabrication; microfluidics; knudsen pump; dry film; lamination; photolithography