3D micro-structures for rarefied gas flow applications manufactured via two-photon-polymerization Articles uri icon

authors

  • ZHANG, DINGDONG
  • LOPEZ QUESADA, GUILLERMO
  • BERGOLDT, SAMUEL
  • HENGSBACH, STEFAN
  • BADE, Klaus
  • COLIN, Stéphane
  • ROJAS CARDENAS, Marcos

published in

publication date

  • February 2023

start page

  • 1

end page

  • 10

issue

  • 111915

volume

  • 211

International Standard Serial Number (ISSN)

  • 0042-207X

Electronic International Standard Serial Number (EISSN)

  • 1879-2715

abstract

  • In this work, the two-photon-polymerization (TPP) fabrication technique was employed to manufacture three-dimensional (3D) micro-structures suitable for confined rarefied gas flows. Four different micro-tubes of simple geometry have been tested in vacuum conditions. The geometry of the micro-tubes was characterized via a focus-variation 3D optical measurement microscope, a digital microscope and an X-ray-....tomography. Mass flow rate measurements of pressure-driven rarefied gas flows of nitrogen in slip and transition regimes were compared to theoretical values obtained via the kinetic theory of gases. The experimental measurements were realized via the constant volume technique. The good agreement obtained between experimental and numerical results proves the feasibility of using this fabrication technique to create well controlled 3D shaped microsystems for rarefied gas flows applications.

subjects

  • Industrial Engineering

keywords

  • microfluidics; microfabrication; rarefied gas flows; two-photon-polymerization