Contactless RF Probe Interconnect Technology Enabling Broadband Testing to the Terahertz Range Articles uri icon

publication date

  • October 2022

start page

  • 35

end page

  • 43


  • 1


  • 13

International Standard Serial Number (ISSN)

  • 2156-342X

Electronic International Standard Serial Number (EISSN)

  • 2156-3446


  • Radiofrequency (RF) probes based on 50 planar transmission lines play a key role in almost every stage of RF device development, establishing the physical contact between high-end instrumentation and the device. With the continuous downscaling of semiconductor technologies to reach into the millimeter-wave (30-300 GHz) and Terahertz (300 GHz to 3 THz) bands and devices exhibiting broader frequency response, current RF probe technology is the Achilles heel for precise and repeatable measurements. Here, we propose a novel RF probe technology based on the near-field coupling of single-mode dielectric waveguide structures, which according to our full-wave simulations provide an extremely broad frequency range covering from 0 Hz up to 340 GHz, the largest continuous bandwidth reported to date. A concept demonstrator using this approach shows contactless RF probing on test structures, which shows the path toward continuous measurements across the microwave, millimeter-wave, and Terahertz range.


  • Electronics


  • contactless probe; dielectric rod waveguide (drw); terahertz; ultra-wideband interconnection