keywords cmos silicon (si.) technology coupled feeding mechanism ground (gnd) metasurface on-chip antennas terahertz (thz) systems-on-chip applications thz integrated circuits antenna arrays antenna grounds application specific integrated circuits cmos integrated circuits coupled circuits electric impedance feeding microstrip lines programmable logic controllers silicon surface waves system-on-chip timing circuits coupled feeding ground (gnd) metasurface on chip antenna terahertz systems thz integrated circuits antenna feeders