A VCO-based CMOS readout circuit for capacitive MEMS microphones Articles uri icon

authors

  • QUINTERO ALONSO, ANDRES
  • CARDES GARCIA, FERNANDO
  • Perez, Carlos
  • BUFFA, CESARE
  • Wiesbauer, Andreas
  • Hernandez, Luis

publication date

  • January 2019

issue

  • 19

volume

  • 19

International Standard Serial Number (ISSN)

  • 1424-8220

keywords

  • mems microphone; oscillator-based sensor; sigma-delta modulation; time-domain circuit; vco-adc