On the influence of relative humidity on the contact angle of a water droplet on a silicon wafer Conference Contributions uri icon

authors

  • PEREZ DIAZ, JOSE LUIS
  • ALVAREZ VALENZUELA, MARCO ANTONIO
  • VALIENTE BLANCO, IGNACIO
  • JIMENEZ LOPEZ, SERGIO
  • PALACIOS-CUESTA, M.
  • GARCIA, O.
  • DIEZ JIMENEZ, EFREN
  • SANCHEZ GARCIA-CASARRUBIOS, JUAN
  • CRISTACHE, CRISTIAN

event

  • ASME 2013 International Mechanical Engineering Congress and Exposition

event place

  • San Diego, California

country

  • ESTADOS UNIDOS DE AMERICA

participation category

  • PONENCIA

main title

  • Proceedings of ASME International Mechanical Engineering Congress and Exposition

edition country

  • ESTADOS UNIDOS DE AMERICA

publication date

  • 2013

isbn

  • 9780791856314

keywords

  • semiconductor wafers; drops; water